JPS6130294Y2 - - Google Patents
Info
- Publication number
- JPS6130294Y2 JPS6130294Y2 JP16960284U JP16960284U JPS6130294Y2 JP S6130294 Y2 JPS6130294 Y2 JP S6130294Y2 JP 16960284 U JP16960284 U JP 16960284U JP 16960284 U JP16960284 U JP 16960284U JP S6130294 Y2 JPS6130294 Y2 JP S6130294Y2
- Authority
- JP
- Japan
- Prior art keywords
- refrigerant
- evaporator
- liquid
- collection tank
- liquid level
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003507 refrigerant Substances 0.000 claims description 44
- 239000007788 liquid Substances 0.000 claims description 36
- 238000001816 cooling Methods 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000007791 liquid phase Substances 0.000 claims description 4
- 238000009835 boiling Methods 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 4
- 239000012071 phase Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- CYRMSUTZVYGINF-UHFFFAOYSA-N trichlorofluoromethane Chemical compound FC(Cl)(Cl)Cl CYRMSUTZVYGINF-UHFFFAOYSA-N 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16960284U JPS6099545U (ja) | 1984-11-08 | 1984-11-08 | 半導体装置用沸騰冷却装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16960284U JPS6099545U (ja) | 1984-11-08 | 1984-11-08 | 半導体装置用沸騰冷却装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6099545U JPS6099545U (ja) | 1985-07-06 |
| JPS6130294Y2 true JPS6130294Y2 (en]) | 1986-09-05 |
Family
ID=30370483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16960284U Granted JPS6099545U (ja) | 1984-11-08 | 1984-11-08 | 半導体装置用沸騰冷却装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6099545U (en]) |
-
1984
- 1984-11-08 JP JP16960284U patent/JPS6099545U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6099545U (ja) | 1985-07-06 |
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